ELEMENTAL MAPPING USING AN IMAGING ENERGY FILTER - IMAGE-FORMATION AND RESOLUTION LIMITS

被引：35

作者：

BERGER, A

KOHL, H

机构：

来源：

MICROSCOPY MICROANALYSIS MICROSTRUCTURES | 1992年 / 3卷 / 2-3期

关键词：

D O I：

10.1051/mmm:0199200302-3015900

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The formation of elemental maps in an electron microscope with an imaging energy filter is discussed. The validity of the dipole approximation for the computation of element specific images is demonstrated by explicit comparison with central-field calculations. To obtain a reasonable signal/noise ratio it is vital to use a finite energy window. The attainable resolution is calculated as a function of the width of the energy window. A practical resolution limit of about 1 nm seems feasible.

引用

页码：159 / 174

页数：16

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