FACTORS CONTROLLING THE ETCHING RATE AND ETCHING PROFILE IN THE O-2 REACTIVE ION ETCHING PATTERN TRANSFER STEP IN MULTILEVEL LITHOGRAPHY

被引：6

作者：

JURGENSEN, CW

SHAQFEH, ESG

机构：

来源：

POLYMER ENGINEERING AND SCIENCE | 1989年 / 29卷 / 13期

关键词：

D O I：

10.1002/pen.760291310

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：878 / 881

页数：4

共 17 条

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