CHARACTERIZATION OF ALXGA1-XAS-GAAS LAYER STRUCTURES BY SCANNING AUGER-ELECTRON MICROSCOPY

被引：10

作者：

VANOOSTROM, A

AUGUSTUS, L

NIJMAN, W

LESWIN, W

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期

关键词：

D O I：

10.1116/1.570468

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：40 / 43

页数：4

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