EDGE POSITION MEASUREMENT WITH A SCANNING PROBE MICROSCOPE

被引：12

作者：

GRIFFITH, JE

MARCHMAN, HM

HOPKINS, LC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587472

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3567 / 3570

页数：4

共 13 条

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[6]

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[10] A ROCKING BEAM ELECTROSTATIC BALANCE FOR THE MEASUREMENT OF SMALL FORCES [J].

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