REFLECTION OF LIGHT-ION FROM SOLID-SURFACES STUDIED BY MONTE-CARLO SIMULATION AND TRANSPORT-THEORY

被引:7
作者
XIA, YY [1 ]
XU, XG [1 ]
TAN, CY [1 ]
MEI, LM [1 ]
YANG, H [1 ]
SUN, XF [1 ]
机构
[1] SHANDONG UNIV,DEPT COMP SCI,JINAN 250100,PEOPLES R CHINA
关键词
D O I
10.1063/1.347681
中图分类号
O59 [应用物理学];
学科分类号
摘要
The reflection from amorphous Cu and Ni surfaces of light ions, such as H+, He-3+, and He-4+ in the energy region of 0.1-10 keV, has been studied by computer simulation and transport theory. The results show that the energy distribution of the reflected particles can be approximately described by a universal empirical formula for the whole energy region, all the angles of incidence, and the different ion-target combinations studied here, and the angular distributions of the reflected particles can be described by a cosine expansion, with a few terms. In the transport theory calculation of the particle and energy reflection coefficients, the energy distribution spectra of the reflected particle s are used to give a realistic surface correction. The present work is compared with both experimental data and other simulation codes.
引用
收藏
页码:439 / 446
页数:8
相关论文
共 41 条
[1]  
AEDERSEN HH, 1976, J APPL PHYS, V47, P13
[2]  
Andersen H. H., 1977, HYDROGEN STOPPING PO
[3]   REFINED UNIVERSAL POTENTIALS IN ATOMIC-COLLISIONS [J].
BIERSACK, JP ;
ZIEGLER, JF .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :93-100
[4]   A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].
BIERSACK, JP ;
HAGGMARK, LG .
NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269
[5]   SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].
BIERSACK, JP ;
ECKSTEIN, W .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94
[6]  
Bottiger J., 1973, Radiation Effects, V20, P65, DOI 10.1080/00337577308232267
[7]  
BRICE DK, 1975, ION IMPLANTATION RAN, V1
[8]   TRAPPING AND REFLECTION COEFFICIENTS FOR HE-3 IN NI AT OBLIQUE-INCIDENCE [J].
CHEN, CK ;
ECKSTEIN, W ;
SCHERZER, BMU .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (01) :37-44
[9]   REFLECTION OF HYDROGEN FROM STAINLESS-STEEL FOR NON-NORMAL INCIDENCE [J].
ECKSTEIN, W ;
VERBEEK, H .
JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) :518-523
[10]   COMPUTER-SIMULATION OF THE BACKSCATTERING AND IMPLANTATION OF HYDROGEN AND HELIUM [J].
ECKSTEIN, W ;
VERBEEK, H ;
BIERSACK, JP .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (02) :1194-1200