THERMAL-OXIDATION OF GAAS IN ARSENIC TRIOXIDE VAPOR

被引：29

作者：

TAKAGI, H

KANO, G

TERAMOTO, I

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 04期

关键词：

D O I：

10.1149/1.2131503

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

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页码：579 / 581

页数：3

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[1] ANODIC-OXIDATION OF GAAS IN MIXED SOLUTIONS OF GLYCOL AND WATER
HASEGAWA, H
HARTNAGEL, HL
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) : 713 - 723
[2] NEW ANODIC NATIVE OXIDE OF GAAS WITH IMPROVED DIELECTRIC AND INTERFACE PROPERTIES
HASEGAWA, H
FORWARD, KE
HARTNAGEL, HL
[J]. APPLIED PHYSICS LETTERS, 1975, 26 (10) : 567 - 569
[3] IMPROVED METHOD OF ANODIC-OXIDATION OF GAAS
HASEGAWA, H
FORWARD, KE
HARTNAGEL, HL
[J]. ELECTRONICS LETTERS, 1975, 11 (03) : 53 - 54
[4] KOSHIGA F, 1976, 8TH C SOL STAT DEV T
[5] DEPLETION-MODE GAAS MOS FET
LILE, DL
CLAWSON, AR
COLLINS, DA
[J]. APPLIED PHYSICS LETTERS, 1976, 29 (03) : 207 - 208
[6] THERMAL OXIDATION OF GAAS
MURARKA, SP
[J]. APPLIED PHYSICS LETTERS, 1975, 26 (04) : 180 - 181
[7] SHIMANO A, COMMUNICATION
[8] PREPARATION AND STABILIZATION OF ANODIC OXIDES ON GAAS
SPITZER, SM
SCHWARTZ, B
WEIGLE, GD
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (03) : 397 - 402