MATHEMATICAL-MODELING OF COLD-WALL CHANNEL CVD REACTORS

被引：33

作者：

HOLSTEIN, WL ^{[1
]}

FITZJOHN, JL ^{[1
]}

FAHY, EJ ^{[1
]}

GILMOUR, PW ^{[1
]}

SCHMELZER, ER ^{[1
]}

机构：

[1] DUPONT CO,DEPT CENT RES & DEV,EXPTL STN,WILMINGTON,DE 19898

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 94卷 / 01期

关键词：

D O I：

10.1016/0022-0248(89)90612-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：131 / 144

页数：14

相关论文

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