EFFECT OF SODIUM OXIDE ON THERMAL OXIDATION OF SILICON

被引：4

作者：

DEVEREUX, OF

WANG, RY

CHIEN, KH

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1971年 / 118卷 / 07期

关键词：

D O I：

10.1149/1.2408270

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

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页码：1147 / &

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