USE OF NUCLEAR-REACTIONS AND SIMS FOR QUANTITATIVE DEPTH PROFILING OF HYDROGEN IN AMORPHOUS SILICON

被引：57

作者：

CLARK, GJ

WHITE, CW

ALLRED, DD

APPLETON, BR

MAGEE, CW

CARLSON, DE

机构：

[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830

[2] RCA,PRINCETON,NJ 08540

来源：

关键词：

D O I：

10.1063/1.89787

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：582 / 585

页数：4

共 13 条

[1] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON
BRODSKY, MH
FRISCH, MA
ZIEGLER, JF
LANFORD, WA
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (11) : 561 - 563
[2] AMORPHOUS SILICON SOLAR-CELLS
CARLSON, DE
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (04) : 449 - 453
[3] CLARK G, TO BE PUBLISHED
[4] HINTHORNE JR, 1975, AM MINERAL, V60, P143
[5] NEW PRECISION TECHNIQUE FOR MEASURING CONCENTRATION VERSUS DEPTH OF HYDROGEN IN SOLIDS
LANFORD, WA
TRAUTVETTER, HP
ZIEGLER, JF
KELLER, J
[J]. APPLIED PHYSICS LETTERS, 1976, 28 (09) : 566 - 568
[6] TECHNIQUE FOR MEASURING HYDROGEN CONCENTRATION VERSUS DEPTH IN SOLID SAMPLES
LEICH, DA
TOMBRELLO, TA
[J]. NUCLEAR INSTRUMENTS & METHODS, 1973, 108 (01): : 67 - 71
[7] LEUCHTAG HR, 1977, PHYS TODAY, V30, P17
[8] MAGEE CL, TO BE PUBLISHED
[9] MAGEE CW, 1976, 3RD ANN C FACSS PHIL
[10] Northcliffe L. S., 1970, NUCL DATA A, V7, P233