ELECTROFORMING AND CONDUCTION IN THIN ANODIZED Y2O3 FILMS

被引:12
作者
KURIKI, S
NOYA, A
MATSUMOTO, G
机构
关键词
D O I
10.1016/0040-6090(78)90328-0
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:27 / 41
页数:15
相关论文
共 29 条
[1]   BREAKDOWN OF THIN-FILM EMITTERS [J].
AHMED, H .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (01) :242-&
[2]   ELECTRONEGATIVITY VALUES FROM THERMOCHEMICAL DATA [J].
ALLRED, AL .
JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1961, 17 (3-4) :215-221
[3]   DETERMINATION OF DIELECTRIC BEHAVIOR AT LOW FREQUENCIES FROM MEASUREMENTS OF ANOMALOUS CHARGING AND DISCHARGING CURRENTS [J].
BAIRD, ME .
REVIEWS OF MODERN PHYSICS, 1968, 40 (01) :219-&
[4]   DIFFUSION OF OXYGEN IN SELECTED MONOCRYSTALLINE RARE EARTH OXIDES [J].
BERARD, MF ;
WIRKUS, CD ;
WILDER, DR .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1968, 51 (11) :643-&
[5]  
Campbell C. K., 1970, Thin Solid Films, V6, P197, DOI 10.1016/0040-6090(70)90039-8
[6]   ELECTROFORMING OF MIM THIN-FILM DEVICES IN AIR AT ATMOSPHERIC PRESSURE [J].
COLLINS, RA ;
BOWMAN, G ;
SUTHERLAND, RR .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1971, 4 (11) :L49-+
[7]   CONDUCTING FILAMENTS AND VOLTAGE-CONTROLLED NEGATIVE-RESISTANCE IN AL-AL2-O3-AU STRUCTURES WITH AMORPHOUS DIELECTRIC [J].
EMMER, I .
THIN SOLID FILMS, 1974, 20 (01) :43-52
[8]   RF SPUTTERED YTTRIA CAPACITORS [J].
GOLDSTEIN, RM ;
WIGGINTO.SC .
THIN SOLID FILMS, 1969, 3 (06) :R41-+
[9]  
GOLDSTEIN RM, 1968, 18TH P EL C IEEE NEW, P141
[10]  
GOLDSTEIN RM, 1967, 1967 P EL COMP C WAS, P312