THE EFFECT OF INDUCED AIR-FLOW ON THE SPIN COATING OF VISCOUS-LIQUIDS

被引：106

作者：

MIDDLEMAN, S

机构：

[1] UNIV CALIF SAN DIEGO,CTR MAGNET RECORDING RES,LA JOLLA,CA 92093

[2] UNIV CALIF SAN DIEGO,DEPT CHEM ENGN,LA JOLLA,CA 92093

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 06期

关键词：

D O I：

10.1063/1.339465

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2530 / 2532

页数：3

共 13 条

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[10]

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