ELECTRON-BEAM INDUCED METALLIZATION OF PALLADIUM ACETATE

被引：36

作者：

STARK, TJ ^{[1
]}

MAYER, TM ^{[1
]}

GRIFFIS, DP ^{[1
]}

RUSSELL, PE ^{[1
]}

机构：

[1] UNIV N CAROLINA, CHAPEL HILL, NC 27599 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 06期

关键词：

D O I：

10.1116/1.585826

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Films of palladium acetate, Pd(OOCCH3)2 0.1 and 0.3-mu-m thick have been stoichiometrically altered through exposure to electron beams of 1-30 keV. The lowest required doses for alteration, 1000 and 2500-mu-C/cm2, were obtained using beam energies of 4 and 5 keV, respectively. These results have been related to Monte Carlo simulations of energy absorbed within a thin surface film. The minimum line widths of features produced was less than 100 nanometers with estimated Pd/C ratio of 1 and measured resistivities as low as 100-mu-OMEGA cm.

引用

页码：3475 / 3478

页数：4

共 13 条

[1] Bethe H., 1933, HDB PHYS, V24, P273
[2] THE FORMATION OF CONDUCTIVE FILMS ON POLYIMIDE BY ION-BEAM-INDUCED DECOMPOSITION OF METAL-COMPOUNDS
ESKILDSEN, SS
SORENSEN, G
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 481 - 486
[3] ESTROM H, 1989, CHEMTRONICS, V4, P201
[4] FELDMAN LC, 1986, FUNDAMENTALS SURFACE, P257
[5] GI KY, 1991, J MICROCHEM MICROENG, V1, P42
[6] Gross M. E., 1989, Chemtronics, V4, P197
[7] ELECTRON-BEAM LITHOGRAPHY - ITS APPLICATIONS
HOHN, FJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06): : 1405 - 1411
[8] A MODEL FOR CALCULATING SECONDARY AND BACKSCATTERED ELECTRON YIELDS
JOY, DC
[J]. JOURNAL OF MICROSCOPY-OXFORD, 1987, 147 : 51 - 64
[9] ELECTRON-BEAM INDUCED SURFACE NUCLEATION AND LOW-TEMPERATURE DECOMPOSITION OF METAL-CARBONYLS
KUNZ, RR
MAYER, TM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (05): : 1557 - 1564
[10] Mayer T.M., 1991, THIN FILM PROCESSES, V2

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