TEMPERATURE-MEASUREMENT DURING LASER-HEATING OF THIN-FILMS USING A TEMPERATURE-SENSITIVE PHOSPHOR

被引：5

作者：

ALTKORN, RI ^{[1
]}

ANDRESHAK, JC ^{[1
]}

GUPTA, A ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 03期

关键词：

D O I：

10.1007/BF00619397

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：273 / 276

页数：4

共 19 条

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[10] NON-CONTACT SURFACE-TEMPERATURE MEASUREMENT DURING REACTIVE-ION ETCHING USING FLUORESCENT POLYMER-FILMS [J].

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