EFFECTS OF SPATIALLY INHOMOGENEOUS OXIDE CHARGE DISTRIBUTION ON MOS CAPACITANCE-VOLTAGE CHARACTERISTICS

被引:30
作者
MCNUTT, MJ
SAH, CT
机构
[1] UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
关键词
D O I
10.1063/1.1663887
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:3916 / 3921
页数:6
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