CORRELATION BETWEEN ELECTRON TRAP DENSITY AND HYDROGEN CONCENTRATION IN ULTRATHIN RAPIDLY REOXIDIZED NITRIDED OXIDES

被引：34

作者：

HORI, T ^{[1
]}

IWASAKI, H ^{[1
]}

YOSHIOKA, Y ^{[1
]}

SATO, M ^{[1
]}

机构：

[1] MATSUSHITA TECHNORES INC,MORIGUCHI,OSAKA 570,JAPAN

来源：

关键词：

D O I：

10.1063/1.99364

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：736 / 738

页数：3

共 15 条

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