MOVPE OF HIGH-QUALITY ZNSE - ROLE OF MISMATCH ON REFLECTIVITY AND PHOTOCONDUCTIVITY

被引:6
作者
AULOMBARD, RL
AVEROUS, M
BRIOT, O
CALAS, J
COQUILLAT, D
HAMDANI, F
LASCARAY, JP
MOULIN, N
TEMPIER, N
机构
[1] Groupe d'Etudes des Semiconducteurs, UA 357, Université des Sciences et Techniques du Languedoc, Place E. Bataillon
关键词
D O I
10.1016/0022-0248(90)90966-O
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Metalorganic vapor phase epitaxy was used to grow high quality ZnSe. Two procedures were employed involving growth both at 300 and 500 °C. To achieve epitaxy of ZnSe at temperatures as low as 300 °C from alkyls, it was necessary to use a special double zone reactor. Reflectivity spectra show the lattice deformation due to mismatch for layers thinner than 1 μm. Photoconductivity responses related to the layer thickness are also reported. © 1989.
引用
收藏
页码:204 / 207
页数:4
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