NANOFABRICATION OF TITANIUM SURFACE BY TIP-INDUCED ANODIZATION IN SCANNING TUNNELING MICROSCOPY

被引：82

作者：

SUGIMURA, H ^{[1
]}

UCHIDA, T ^{[1
]}

KITAMURA, N ^{[1
]}

MASUHARA, H ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1993年 / 32卷 / 4A期

关键词：

SCANNING TUNNELING MICROSCOPY; SURFACE MODIFICATION; TITANIUM; TITANIUM OXIDE; ANODIZATION;

D O I：

10.1143/JJAP.32.L553

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A titanium (Ti) surface was arbitrarily oxidized by a scanning tunneling microscope STM. Oxidation of the Ti surface was induced by scanning an STM tip with the sample (Ti) bias of more than +3 V, and a dot or line pattern of oxide was fabricated on Ti with the spatial resolution of 70 nm. The results were discussed in terms of tip-induced anodization of Ti due to water adsorbed on the surface.

引用

收藏

页码：L553 / L555

页数：3

相关论文

共 11 条

[1] MODIFICATION OF HF-TREATED SILICON (100) SURFACES BY SCANNING TUNNELING MICROSCOPY IN AIR UNDER IMAGING CONDITIONS [J].

BARNIOL, N ;

PEREZMURANO, F ;

AYMERICH, X .

APPLIED PHYSICS LETTERS, 1992, 61 (04) :462-464

[2] MODIFICATION OF HYDROGEN-PASSIVATED SILICON BY A SCANNING TUNNELING MICROSCOPE OPERATING IN AIR [J].

DAGATA, JA ;

SCHNEIR, J ;

HARARY, HH ;

EVANS, CJ ;

POSTEK, MT ;

BENNETT, J .

APPLIED PHYSICS LETTERS, 1990, 56 (20) :2001-2003

[3] PATTERN GENERATION ON SEMICONDUCTOR SURFACES BY A SCANNING TUNNELING MICROSCOPE OPERATING IN AIR [J].

DAGATA, JA ;

SCHNEIR, J ;

HARARY, HH ;

BENNETT, J ;

TSENG, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :1384-1388

[4] INTEGRATION OF SCANNING TUNNELING MICROSCOPE NANOLITHOGRAPHY AND ELECTRONICS DEVICE PROCESSING [J].

DAGATA, JA ;

TSENG, W ;

BENNETT, J ;

DOBISZ, EA ;

SCHNEIR, J ;

HARARY, HH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1992, 10 (04) :2105-2113

[5] BREAKDOWN AND EFFICIENCY OF ANODIC OXIDE-GROWTH ON TITANIUM [J].

DYER, CK ;

LEACH, JSL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (07) :1032-1038

[6] TIP SAMPLE FORCES IN SCANNING PROBE MICROSCOPY IN AIR AND VACUUM [J].

GRIGG, DA ;

RUSSELL, PE ;

GRIFFITH, JE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1992, 10 (04) :680-683

[7] NANOTECHNOLOGY - SWITCH TO ATOM CONTROL [J].

QUATE, CF .

NATURE, 1991, 352 (6336) :571-571

[8] PHOTOEXCITATION EFFECTS ON SCANNING TUNNELING MICROSCOPE IMAGES OF SURFACE OXIDE LAYER OF TITANIUM [J].

SUGIMURA, H ;

KITAMURA, N ;

MASUHARA, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1992, 31 (10B) :L1506-L1508

[9] MODIFICATION OF TANTALUM SURFACES BY SCANNING TUNNELING MICROSCOPY IN AN ELECTROCHEMICAL-CELL [J].

THUNDAT, T ;

NAGAHARA, LA ;

ODEN, PI ;

LINDSAY, SM ;

GEORGE, MA ;

GLAUNSINGER, WS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04) :3537-3541

[10]

VIJH AK, 1977, OXIDES OXIDE FILMS, V5