THIN EPITAXIAL CEO2 FILMS PREPARED BY AEROSOL MOCVD

被引:14
作者
FROHLICH, K [1 ]
MACHAJDIK, D [1 ]
WEISS, F [1 ]
BOCHU, B [1 ]
机构
[1] ECOLE NATL SUPER PHYS GRENOBLE,LMGP,CNRS,URA 1109,F-38402 ST MARTIN DHERES,FRANCE
关键词
D O I
10.1016/0167-577X(94)90244-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin epitaxial CeO2 films were prepared on (001) MgO and (1 $($) over bar$$ 102) Al2O3 single crystal substrates by the aerosol MOCVD method. X-ray diffraction analysis using a four-circle texture goniometer revealed small amount of in-plane misoriented CeO2 crystallites for the MgO substrate and high epitaxial degree of CeO2 films deposited on (1 $($) over bar$$ 102) Al2O3.
引用
收藏
页码:377 / 380
页数:4
相关论文
共 9 条
[1]   DEMONSTRATION OF Y1BA2CU3O7-DELTA AND COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR DEVICE FABRICATION ON THE SAME SAPPHIRE SUBSTRATE [J].
BURNS, MJ ;
DELAHOUSSAYE, PR ;
RUSSELL, SD ;
GARCIA, GA ;
CLAYTON, SR ;
RUBY, WS ;
LEE, LP .
APPLIED PHYSICS LETTERS, 1993, 63 (09) :1282-1284
[2]   LARGE-AREA YBA2CU3O7-DELTA THIN-FILMS ON SAPPHIRE FOR MICROWAVE APPLICATIONS [J].
COLE, BF ;
LIANG, GC ;
NEWMAN, N ;
CHAR, K ;
ZAHARCHUK, G .
APPLIED PHYSICS LETTERS, 1992, 61 (14) :1727-1729
[3]   HIGH-QUALITY EPITAXY OF YBA2CU3O7-X ON SILICON-ON-SAPPHIRE WITH THE MULTIPLE BUFFER LAYER YSZ/CEO2 [J].
COPETTI, CA ;
SOLTNER, H ;
SCHUBERT, J ;
ZANDER, W ;
HOLLRICHER, O ;
BUCHAL, C ;
SCHULZ, H ;
TELLMANN, N ;
KLEIN, N .
APPLIED PHYSICS LETTERS, 1993, 63 (10) :1429-1431
[4]  
DAHMEN KH, 1992, P S A1 INT C ADV MAT, P715
[5]   SOLID SOURCE MOCVD FOR THE EPITAXIAL-GROWTH OF THIN OXIDE-FILMS [J].
LU, Z ;
FEIGELSON, RS ;
ROUTE, RK ;
DICAROLIS, SA ;
HISKES, R ;
JACOWITZ, RD .
JOURNAL OF CRYSTAL GROWTH, 1993, 128 (1-4) :788-792
[6]   SURFACE-RESISTANCE OF EPITAXIAL YBA2CU3O7 THIN-FILMS ON CEO2 DIFFUSION-BARRIERS ON SAPPHIRE [J].
MERCHANT, P ;
JACOWITZ, RD ;
TIBBS, K ;
TABER, RC ;
LADERMAN, SS .
APPLIED PHYSICS LETTERS, 1992, 60 (06) :763-765
[7]   PREPARATION OF YBA2CU3O7 FILMS BY LOW-PRESSURE MOCVD USING LIQUID SOLUTION SOURCES [J].
WEISS, F ;
FROHLICH, K ;
HAASE, R ;
LABEAU, M ;
SELBMANN, D ;
SENATEUR, JP ;
THOMAS, O .
JOURNAL DE PHYSIQUE IV, 1993, 3 (C3) :321-328
[8]   EPITAXIAL CEO2 FILMS AS BUFFER LAYERS FOR HIGH-TEMPERATURE SUPERCONDUCTING THIN-FILMS [J].
WU, XD ;
DYE, RC ;
MUENCHAUSEN, RE ;
FOLTYN, SR ;
MALEY, M ;
ROLLETT, AD ;
GARCIA, AR ;
NOGAR, NS .
APPLIED PHYSICS LETTERS, 1991, 58 (19) :2165-2167
[9]  
34394 POWD DIFFR FIL