SELF-INDUCED LATERALLY MODULATED GAINP/INASP STRUCTURE GROWN BY METAL-ORGANIC VAPOR-PHASE EPITAXY

被引:59
作者
PONCHET, A [1 ]
ROCHER, A [1 ]
OUGAZZADEN, A [1 ]
MIRCEA, A [1 ]
机构
[1] FRANCE TELECOM,CNET,PAB,F-92225 BAGNEUX,FRANCE
关键词
D O I
10.1063/1.356573
中图分类号
O59 [应用物理学];
学科分类号
摘要
Zero-net strained multilayer alternating tensile GaInP and compressive InAsP have been grown on (001)InP by metal-organic vapor-phase epitaxy. A structural analysis using transmission electron microscopy (TEM). is reported. A remarkably regular laterally modulated structure has been observed. GaInP- and InAsP-rich vertical zones alternate with a periodicity of 0.28 mum along the lateral [110] direction, thus balancing the mismatch along the [110] rather than the [001] growth direction. TEM experiments suggest that each vertical zone is partially elastically relaxed.
引用
收藏
页码:7881 / 7883
页数:3
相关论文
共 16 条
[11]   STRAINED GAXIN1-XP MULTIPLE QUANTUM WIRE LIGHT-EMITTING-DIODES - A LUMINESCENCE POLARIZATION STUDY [J].
PEARAH, PJ ;
STELLINI, EM ;
CHEN, AC ;
MOY, AM ;
HSIEH, KC ;
CHENG, KY .
APPLIED PHYSICS LETTERS, 1993, 62 (07) :729-731
[12]   EVOLUTION OF SURFACE-MORPHOLOGY AND STRAIN DURING SIGE EPITAXY [J].
PIDDUCK, AJ ;
ROBBINS, DJ ;
CULLIS, AG ;
LEONG, WY ;
PITT, AM .
THIN SOLID FILMS, 1992, 222 (1-2) :78-84
[13]   LATERAL MODULATIONS IN ZERO-NET-STRAINED GAINASP MULTILAYERS GROWN BY GAS-SOURCE MOLECULAR-BEAM EPITAXY [J].
PONCHET, A ;
ROCHER, A ;
EMERY, JY ;
STARCK, C ;
GOLDSTEIN, L .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (06) :3778-3782
[14]   ON THE STABILITY OF SURFACES OF STRESSED SOLIDS [J].
SROLOVITZ, DJ .
ACTA METALLURGICA, 1989, 37 (02) :621-625
[15]  
WANG J, 1993, I PHYS C SER, V134, P295
[16]  
YAMAMOTO M, 1993, 5TH INT C INP REL MA