WAVY STEPS ON SI(001)

被引:95
作者
TROMP, RM
REUTER, MC
机构
[1] IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598
关键词
D O I
10.1103/PhysRevLett.68.820
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Using low-energy electron microscopy we have found a new phase transition on the Si(001) surface at miscut angles smaller than approximately 0.1-degrees. The surface phase separates into facets with approximately 300 angstrom terrace width, and regions with much larger, wavy terraces. This wavy phase is stabilized by a reduction of surface-stress-induced strain energy. A theoretical study by Tersoff and Pehlke compares favorably with our observations.
引用
收藏
页码:820 / 822
页数:3
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