ENERGY-FILTERING THE THERMAL DIFFUSE BACKGROUND IN ELECTRON-DIFFRACTION

被引:19
作者
EAGLESHAM, DJ
BERGER, SD
机构
[1] AT and T Bell Laboratories, 600 Mountain Avenue, Murray Hill
关键词
D O I
10.1016/0304-3991(94)90044-2
中图分类号
TH742 [显微镜];
学科分类号
摘要
The diffuse background in high-energy electron diffraction is generally attributed to phonon scattering, and referred to as the thermal-diffuse background. We use electron energy loss spectroscopy to show that diffuse scattering may be dominated by energy losses in the 100-1000 eV range caused by electron-electron (Compton) scattering. Although e-e scattering is thoroughly studied, the fact that this process contributes much of the diffuse intensity even in materials with low Debye temperatures is not generally appreciated. The electron-electron and phonon contributions in the high-angle diffuse background in typical CBED patterns are in a 1.5:1, 0.9:1, 0.7:1, 0.15:1 and 0.05:1 ratio for diamond, Al, Si, GaAs and Au, respectively: diffuse scattering does become dominated by phonons for very high Z. The large e-e contribution explains how energy filtering improves the signal-to-background in electron diffraction, and has important implications for the temperature dependence of diffraction patterns and for ''Z-contrast'' microscopy.
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页码:319 / 324
页数:6
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