SPUTTERING OF MOLECULES AND CLUSTERS

被引：21

作者：

DEVRIES, AE

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 27卷 / 01期

关键词：

D O I：

10.1016/0168-583X(87)90018-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：173 / 180

页数：8

共 47 条

[1]

BEHRISCH R, IN PRESS TOPICS APPL, V3

[2]

BEHRISCH R, 1981, TOPICS APPLIED PHYSI, V1

[3]

BEHRISCH R, 1983, TOPICS APPLIED PHYSI, V2

[4] SPUTTERING OF SOLID SO2 [J].

BORING, JW ;

GARRETT, JW ;

CUMMINGS, TA ;

JOHNSON, RE ;

BROWN, WL .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 1 (2-3) :321-326

[5] ION-INDUCED CHEMISTRY IN CONDENSED GAS SOLIDS [J].

BORING, JW ;

JOHNSON, RE ;

REIMANN, CT ;

GARRET, JW ;

BROWN, WL ;

MARCANTONIO, KJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :707-711

[6] ELECTRONIC SPUTTERING OF LOW-TEMPERATURE MOLECULAR-SOLIDS [J].

BROWN, WL ;

AUGUSTYNIAK, WM ;

MARCANTONIO, KJ ;

SIMMONS, EH ;

BORING, JW ;

JOHNSON, RE ;

REIMANN, CT .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 1 (2-3) :307-314

[7] EROSION OF METHANE INDUCED BY ELECTRON-BOMBARDMENT [J].

CALCAGNO, L ;

OOSTRA, DJ ;

PEDRYS, R ;

HARING, A ;

DEVRIES, AE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 17 (01) :22-24

[8] ION-ASSISTED AND ELECTRON-ASSISTED GAS-SURFACE CHEMISTRY - IMPORTANT EFFECT IN PLASMA-ETCHING [J].

COBURN, JW ;

WINTERS, HF .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) :3189-3196

[9] PLASMA-ASSISTED ETCHING - ION-ASSISTED SURFACE-CHEMISTRY [J].

COBURN, JW ;

WINTERS, HF .

APPLICATIONS OF SURFACE SCIENCE, 1985, 22-3 (MAY) :63-71

[10] INTERNAL ENERGY-DISTRIBUTION OF SPUTTERED SULFUR MOLECULES [J].

DEJONGE, R ;

BALLER, T ;

TENNER, MG ;

DEVRIES, AE ;

SNOWDON, KJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 17 (03) :213-226

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