GROWTH OF ZNO THIN-FILMS ON GAAS BY PULSED-LASER DEPOSITION

被引：75

作者：

CRACIUN, V ^{[1
]}

ELDERS, J ^{[1
]}

GARDENIERS, JGE ^{[1
]}

GERETOVSKY, J ^{[1
]}

BOYD, IW ^{[1
]}

机构：

[1] UNIV TWENTE,MESA RES INST,7500 AE ENSCHEDE,NETHERLANDS

来源：

THIN SOLID FILMS | 1995年 / 259卷 / 01期

关键词：

LASER ABLATION; ZINC OXIDE; X-RAY DIFFRACTION; DEPOSITION PROCESS; STRUCTURAL PROPERTIES;

D O I：

10.1016/0040-6090(94)09479-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

ZnO thin films have been grown on GaAs substrates using the pulsed laser deposition technique with or without a photodeposited SiO2 buffer layer. The presence of the SiO2 layer has a beneficial effect on the crystalline quality of the grown ZnO films. Highly c-axis oriented ZnO films having a full width at half maximum value of the (002) X-ray diffraction line of less than 0.13 degrees have been grown on such buffer layers at a substrate temperature of only 350 degrees C.

引用

页码：1 / 4

页数：4

共 20 条

[1]

AMIRHAGHI S, 1993, MATER RES SOC SYMP P, V285, P489

[2]

[Anonymous], 1993, ELEMENTS XRAY DIFFRA

[3] DIRECT PHOTO-DEPOSITION OF SILICON DIOXIDE FILMS USING A XENON EXCIMER LAMP [J].

BERGONZO, P ;

KOGELSCHATZ, U ;

BOYD, IW .

APPLIED SURFACE SCIENCE, 1993, 69 (1-4) :393-397

[4] DEVELOPMENT OF A NOVEL LARGE AREA EXCIMER LAMP FOR DIRECT PHOTO DEPOSITION OF THIN-FILMS [J].

BERGONZO, P ;

PATEL, P ;

BOYD, IW ;

KOGELSCHATZ, U .

APPLIED SURFACE SCIENCE, 1992, 54 :424-429

[5] MAGNETIC AND STRUCTURAL-PROPERTIES OF PT CO AND PD CO MULTILAYERS SPUTTERED ON SINGLE-CRYSTAL ZNO [J].

CARCIA, PF ;

LI, ZG ;

VANKESTEREN, HW .

THIN SOLID FILMS, 1994, 246 (1-2) :126-130

[6]

CRACIUN V, IN PRESS APPL SURF S

[7] THE EFFECTS OF DEPOSITION RATE ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF ZNO-AL FILMS DEPOSITED ON (1120) ORIENTED SAPPHIRE SUBSTRATES [J].

IGASAKI, Y ;

SAITO, H .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (07) :3613-3619

[8] FORCE SENSING MICROCANTILEVER USING SPUTTERED ZINC-OXIDE THIN-FILM [J].

ITOH, T ;

SUGA, T .

APPLIED PHYSICS LETTERS, 1994, 64 (01) :37-39

[9]

KALDIS E, 1981, CURRENT TOPICS MATER, V7

[10] THIN-FILM INDUCED STRESS IN GAAS RIDGE-WAVE-GUIDE STRUCTURES INTEGRATED WITH SPUTTER-DEPOSITED ZNO FILMS [J].

KIM, HK ;

KLEEMEIER, W ;

LI, YB ;

LANGER, DW ;

CASSIDY, DT ;

BRUCE, DM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (03) :1328-1332

← 1 2 →