MULTIPLE FLAME DEPOSITION OF DIAMOND FILMS

被引：18

作者：

TZENG, Y ^{[1
]}

PHILLIPS, R ^{[1
]}

CUTSHAW, C ^{[1
]}

SRIVINYUNON, T ^{[1
]}

LOO, BH ^{[1
]}

WANG, P ^{[1
]}

机构：

[1] UNIV ALABAMA,DEPT CHEM,HUNTSVILLE,AL 35899

来源：

APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 23期

关键词：

D O I：

10.1063/1.104795

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A multiple flame burner has been used to deposit diamond films of up to 20 mm in diameter from an oxygen-acetylene mixture. The burner consists of nine equally spaced linear holes each sustaining its own flame and rotates under a water-cooled substrate. The diamond film's quality is characterized as a function of its radial distance from the center of the film by scanning electron microscopy, Raman spectroscopy, and photoluminescence spectroscopy. Typical films exhibit variations in thickness and crystal structure with an increasing graphitic component present towards the edge of the film as evidenced by Raman analysis. Photoluminescence spectra exhibit defect bands at 1.95 eV present near the outer edge of the film and at 2.16 eV present near the center of the film. These luminescence bands are discussed and attributed to defects induced from the flame's chemistry.

引用

页码：2645 / 2647

页数：3

共 11 条

[1] CATHODOLUMINESCENCE STUDIES OF SINTERED DIAMOND [J].