CHARACTERIZATION OF GRIDDED FIELD EMITTERS

被引:8
作者
HUANG, M
MACKENZIE, RAD
GODFREY, TJ
SMITH, GDW
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 02期
关键词
D O I
10.1116/1.587378
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A system combining field emission microscopy, field ion microscopy, atom probe. and current-voltage (I-V) measurement facilities has been developed to study gridded field emitter devices, either in the form of single tips or arrays. (I-V) measurement results, field emission images, and field ion images of a single tip and an array of 1500 tips are presented here, of which field ion images of the gridded emitters are reported for the first time. The first atom probe results from a gridded array are also given here, demonstrating that chemical composition analysis of gridded field emission cathodes is possible.
引用
收藏
页码:713 / 716
页数:4
相关论文
共 6 条
[1]  
BRODIE I, 1992, ADV ELECTRON EL PHYS, V83, P1
[2]  
ITOH J, 1992, UNPUB 11TH SENS S, P143
[3]  
KINT R, 1994, J VAC SCI TECHNOL B, V12, P705
[4]   FIELD-EMISSION FROM SILICON THROUGH STABLE CONTAMINANT LAYERS [J].
LIU, J ;
HREN, JJ ;
SON, UT ;
JONES, GW ;
SUNE, CT .
APPLIED SURFACE SCIENCE, 1993, 67 (1-4) :48-55
[5]  
MILLER M.K., 1989, ATOM PROBE MICROANAL
[6]   SINGLE MICROMACHINED EMITTER CHARACTERISTICS [J].
TRINGIDES, MC ;
SEYMOUR, P ;
JACOBS, K ;
BUSTA, HH ;
POGEMILLER, JD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (02) :396-399