ION-BOMBARDMENT ENERGY-DISTRIBUTIONS IN RADIOFREQUENCY GLOW-DISCHARGE SYSTEMS

被引：110

作者：

THOMPSON, BE

ALLEN, KD

RICHARDS, AD

SAWIN, HH

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 06期

关键词：

D O I：

10.1063/1.336417

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1890 / 1903

页数：14

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