EXCIMER-LASER ANNEALED OHMIC CONTACTS TO N-GAAS SUBSTRATES THROUGH AN ULTRATHIN REACTED LAYER

被引：14

作者：

IMANAGA, S

KAWAI, H

KAJIWARA, K

KANEKO, K

WATANABE, N

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 06期

关键词：

D O I：

10.1063/1.339503

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2381 / 2386

页数：6

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