DISLOCATION-FREE DIFFUSION-PROCESSES

被引：18

作者：

LEE, S

LI, JCM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 03期

关键词：

D O I：

10.1063/1.329761

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1336 / 1346

页数：11

共 21 条

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[5]

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[8] DIFFUSION-INDUCED DISLOCATION NETWORKS IN SI ( P + B DIFFUSION E/T ) [J].

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[9]

LEE SY, UNPUBLISHED

[10] DIFFUSION-INDUCED DEFECTS IN SILICON .2. [J].

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