DISLOCATION-FREE DIFFUSION-PROCESSES

被引:18
作者
LEE, S
LI, JCM
机构
关键词
D O I
10.1063/1.329761
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1336 / 1346
页数:11
相关论文
共 21 条
[11]  
LEVINE E, 1967, J APPL PHYS, V38, P81, DOI 10.1063/1.1709015
[12]  
Li Chen-Min, 1978, METALL T A, V9, P1353, DOI DOI 10.1007/BF02661808
[13]   BORON INDUCED DISLOCATIONS IN SILICON [J].
MILLER, DP ;
MOORE, CR ;
MOORE, JE .
JOURNAL OF APPLIED PHYSICS, 1962, 33 (08) :2648-&
[14]   THERMAL STRESS AND PLASTIC DEFORMATION OF THIN SILICON SLICES [J].
MORIZANE, K ;
GLEIM, PS .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (10) :4104-&
[15]  
Penning P., 1958, PHILIPS RES REP, V13, P79
[16]  
Prussin S., 1961, J APPL PHYS, V32, P1876, DOI [10.1063/1.1728256, DOI 10.1063/1.1728256]
[17]   THERMALLY INDUCED DISLOCATIONS IN SILICON [J].
RAICHOUDHURY, P ;
TAKEI, WJ .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (12) :4980-+
[18]   X-RAY OBSERVATIONS OF DIFFUSION-INDUCED DISLOCATIONS IN SILICON [J].
SCHWUTTKE, GH ;
QUEISSER, HJ .
JOURNAL OF APPLIED PHYSICS, 1962, 33 (04) :1540-&
[19]  
SUKHODREVA IM, 1968, SOV PHYS-SOLID STATE, V10, P737
[20]   DIFFUSION-INDUCED DISLOCATIONS IN SILICON [J].
WASHBURN, J ;
THOMAS, G .
JOURNAL OF APPLIED PHYSICS, 1964, 35 (06) :1909-&