MASS AND ENERGY-DISPERSIVE RECOIL SPECTROMETRY OF SIXGE1-X GROWN BY ELECTRON-BEAM EVAPORATION

被引：9

作者：

JOHNSTON, PN

WALKER, SR

BUBB, IF

COHEN, DD

DYTLEWSKI, N

HULT, M

WHITLOW, HJ

ZARING, C

OSTLING, M

ANDERSSON, M

机构：

[1] AUSTRALIAN NUCL SCI & TECHNOL ORG,MENAI 2234,AUSTRALIA

[2] LUND INST TECHNOL,DEPT NUCL PHYS,S-22362 LUND,SWEDEN

[3] ROYAL INST TECHNOL,DEPT SOLID STATE ELECTR,S-16428 KISTA,SWEDEN

[4] UNIV UPPSALA,INST CHEM,S-75121 UPPSALA,SWEDEN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 85卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(94)95948-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Mass and energy dispersive recoil spectrometry employing 77 MeV I-127 ions from the recently commissioned ANTARES (FN Tandem) accelerator facility at Lucas Heights have been used to examine the isotopic composition of samples of SixGe1-x grown by Electron Beam Evaporation (EBE) at the Australian National University. Analysis of RBS spectra using yield simulations indicated the presence of an unobserved element. Oxygen was considered a likely contaminant for incorporation into the SixGe1-x layer by a reaction between Ge and residual oxygen in the EBE system. Determination of oxygen concentration and distribution is not normally possible with RBS but may be inferred from yield simulations using the code RUMP. Recoil spectrometry has shown the presence of oxygen in the SixGe1-x layer at lower concentrations than inferred from RBS and has enabled the determination of energy spectra for individual elements.

引用

页码：907 / 910

页数：4

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