HIGH-RESOLUTION RECOIL SPECTROMETRY FOR SEPARATE CHARACTERIZATION OF GA AND AS IN ALXGA(1-X)AS STRUCTURES

被引：20

作者：

HULT, M ^{[1
]}

WHITLOW, HJ ^{[1
]}

OSTLING, M ^{[1
]}

机构：

[1] ROYAL INST TECHNOL,DEPT SOLID STATE ELECTR,S-16428 KISTA,SWEDEN

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 02期

关键词：

D O I：

10.1063/1.106969

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Mass and energy-dispersive recoil spectrometry, where the recoil energy is derived from the recoil time of flight, has been used to characterize the depth distribution of Al, Ga, and As in an AlxGa(1-x)As quantum-well structure. Signals characterizing the Al, Ga, and As distribution with good separation between Ga and As (average crosstalk < 2%) could be obtained from depths less than 560 nm from the surface. The depth resolution of the As signal at the surface was 16 nm FWHM, which is considerably better than achieved using a silicon particle detector (34 nm).

引用

页码：219 / 221

页数：3

共 17 条

[1] A UHV-COMPATIBLE DELTA-E-E GAS TELESCOPE FOR DEPTH PROFILING AND SURFACE-ANALYSIS OF LIGHT-ELEMENTS [J].

BEHROOZ, AM ;

HEADRICK, RL ;

SEIBERLING, LE ;

ZURMUHLE, RW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (01) :108-112

[2] TIME OF FLIGHT SPECTROMETRY IN HEAVY-ION BACKSCATTERING ANALYSIS [J].

CHEVARIER, A ;

CHEVARIER, N .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :1-5

[3] INDIUM PROFILES IN INGAAS WITH HEAVY-ION RBS [J].

DOBELI, M ;

HAUBERT, PC ;

TOMBRELLO, TA ;

CHYI, JI ;

HUANG, D ;

MORKOC, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 52 (01) :72-78

[4] A TIME-OF-FLIGHT DETECTOR FOR HEAVY-ION RBS [J].

DOBELI, M ;

HAUBERT, PC ;

LIVI, RP ;

SPICKLEMIRE, SJ ;

WEATHERS, DL ;

TOMBRELLO, TA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 56-7 (pt 2) :764-767

[5] A POSITION-SENSITIVE PHOTON DETECTOR USED AS A CHARGED-PARTICLE DETECTOR [J].

LINDROOS, M ;

SKEPPSTEDT, O .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1991, 306 (1-2) :225-228

[6] PERFORMANCE OF A TIME-OF-FLIGHT SPECTROMETER FOR THIN-FILM ANALYSIS BY MEDIUM ENERGY ION-SCATTERING [J].

MENDENHALL, MH ;

WELLER, RA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 47 (02) :193-201

[7] A TIME-OF-FLIGHT SPECTROMETER FOR MEDIUM ENERGY ION-SCATTERING [J].

MENDENHALL, MH ;

WELLER, RA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 :1239-1243

[8] SILICON SURFACE-BARRIER DETECTOR RESOLUTION IN THE 2-30 MEV RANGE [J].

OSTLING, M ;

PETERSSON, CS ;

JOHANSSON, P ;

WIKSTROM, A ;

POSSNERT, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :729-734

[9] RBS ANALYSIS OF ALXGA1-XAS LAYERS USING 30 MEV O-16 IONS [J].

OSTLING, M ;

PETERSSON, CS .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) :88-91

[10] DETERMINATION OF CONCENTRATION PROFILES BY ELASTIC RECOIL DETECTION WITH A DELTA-E-E GAS TELESCOPE AND HIGH-ENERGY INCIDENT HEAVY-IONS [J].

STOQUERT, JP ;

GUILLAUME, G ;

HAGEALI, M ;

GROB, JJ ;

GANTER, C ;

SIFFERT, P .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 44 (02) :184-194

← 1 2 →