X-RAY LITHOGRAPHIC PATTERNING OF MAGNETIC-BUBBLE CIRCUITS WITH SUB-MICRON DIMENSIONS

被引：12

作者：

HOFER, D

POWERS, J

GROBMAN, WD

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570368

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1968 / 1972

页数：5

共 11 条

[1]

FEDER R, 7 P INT C EL ION BEA

[2]

GROBMAN WD, 1978, 8TH P INT C EL ION B, P276

[3]

HOFER D, UNPUBLISHED

[4] MAJOR-MINOR LOOP, SINGLE-LEVEL-MASKING BUBBLE CHIP [J].

KRYDER, MH ;

COHEN, MS ;

MAZZEO, NJ ;

POWERS, JV .

IEEE TRANSACTIONS ON MAGNETICS, 1978, 14 (02) :46-49

[5] 8-MICRON PERIOD BUBBLE-DEVICES [J].

NELSON, TJ ;

BLANK, SL .

IEEE TRANSACTIONS ON MAGNETICS, 1978, 14 (06) :1117-1122

[6]

PARIKH M, 1978, 8TH P INT C EL ION B, P382

[7] HIGH-RESOLUTION PATTERN REPLICATION USING SOFT X-RAYS [J].

SPEARS, DL ;

SMITH, HI .

ELECTRONICS LETTERS, 1972, 8 (04) :102-&

[8]

STEIN BF, 1978, 8 P INT C EL ION BEA

[9]

TISCHER P, 1978, 8TH P INT C EL ION B, P444

[10] 256-KBIT BUBBLE MEMORY CHIP FABRICATION AND CHARACTERIZATION [J].

TSUZUKI, N ;

YAMAMOTO, M ;

HYUGA, F .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (03) :2219-2221

← 1 2 →