A NEW METHOD OF DETECTING PINHOLES EXISTING IN A-SI-H FILMS

被引：3

作者：

SAKAI, Y ^{[1
]}

YAE, S ^{[1
]}

MATSUMURA, M ^{[1
]}

NAKATO, Y ^{[1
]}

TSUBOMURA, H ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN SCI,DEPT CHEM,TOYONAKA,OSAKA 560,JAPAN

来源：

SOLAR ENERGY MATERIALS | 1988年 / 17卷 / 02期

关键词：

D O I：

10.1016/0165-1633(88)90008-1

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：89 / 94

页数：6

共 9 条

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