2D IMAGING ELLIPSOMETRIC MICROSCOPE

被引：15

作者：

PAK, HK

LAW, BM

机构：

[1] Department of Physics, Kansas State University, Manhattan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1995年 / 66卷 / 10期

关键词：

D O I：

10.1063/1.1146183

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A two-dimensional (2D) imaging ellipsometric microscope (IEM) has been constructed. It overcomes several problems inherent in existing 2D imaging ellipsometers. One can use IEM to measure and map the 2D film thickness profile with high spatial resolution and thickness sensitivity. The performance of the device is demonstrated through the study of the thin-film profile of a spreading liquid drop on a molecularly smooth silicon wafer surface. (C) 1995 American Institute of Physics.

引用

页码：4972 / 4976

页数：5

共 17 条

[1]

Azzam R. M. A., 1977, ELLIPSOMETRY POLARIZ

[2] PROFILES OF THE PRECURSOR OF SPREADING DROPS OF SILOXANE OIL ON GLASS, FUSED-SILICA, AND MICA [J].