共 24 条
- [3] Hirschfelder J. O., 1964, MOL THEORY GASES LIQ, P336
- [4] ISHIDA I, 1976, THIN SOLID FILMS, V39, P227
- [5] Kristensen W. D., 1974, Journal of Chemical Physics, V60, P4161, DOI 10.1063/1.1680883
- [7] MATSUBARA K, 1980, 4TH P S ION SOURC IO, P137
- [9] Pfund A. H., 1930, PHYS REV, V35, P1434
- [10] IONIZED-CLUSTER BEAM DEPOSITION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1128 - 1134