VAPORIZED-METAL CLUSTER FORMATION AND IONIZED-CLUSTER BEAM DEPOSITION AND EPITAXY

被引:62
作者
YAMADA, I
TAKAGI, T
机构
关键词
Compendex;
D O I
10.1016/0040-6090(81)90212-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
FILMS
引用
收藏
页码:105 / 115
页数:11
相关论文
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