SURFACE AND BULK DEFECTS IN HYDROGENATED AMORPHOUS-SILICON AND SILICON-BASED ALLOY-FILMS

被引：47

作者：

SHIMIZU, T

XU, XX

KIDOH, H

MORIMOTO, A

KUMEDA, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 10期

关键词：

D O I：

10.1063/1.342458

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5045 / 5049

页数：5

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