NEW METHOD FOR DETERMINATION OF ENERGY-DISTRIBUTION OF SURFACE-STATES IN THE SEMICONDUCTOR BAND-GAP - XPS MEASUREMENTS UNDER BIASES

被引:24
作者
KOBAYASHI, H [1 ]
MORI, T [1 ]
NAMBA, K [1 ]
NAKATO, Y [1 ]
机构
[1] OSAKA UNIV, FAC ENGN SCI, DEPT CHEM, TOYONAKA, OSAKA 560, JAPAN
关键词
D O I
10.1016/0038-1098(94)90886-9
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The energy distribution of surface states in the semiconductor band-gap has been obtained spectroscopically from measurements of X-ray photoelectron spectra (XPS) under biases. The XPS measurements are performed for [ca. 30 angstrom-thick Pt/ca. 25 angstrom-thick oxide/p-InP (100)] MIS diodes. The difference in binding energy between the In(3d) and Pt(4f) peaks, E(In)-E(Pt), is changed by applying biases, because of accumulation of charges in the surface states. The energy distribution of the surface states is determined by analyzing the amount of the bias-induced shift in E(In)-E(Pt). The density of the surface states is high near the mid-gap, near the conduction band minimum and near the valence band maximum.
引用
收藏
页码:249 / 254
页数:6
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