PHASE CHEMISTRY IN THE TI-SI-N SYSTEM - THERMOCHEMICAL REVIEW WITH PHASE-STABILITY DIAGRAMS

被引:65
作者
SAMBASIVAN, S [1 ]
PETUSKEY, WT [1 ]
机构
[1] ARIZONA STATE UNIV,DEPT CHEM,TEMPE,AZ 85287
关键词
D O I
10.1557/JMR.1994.2362
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The phase chemistry and thermodynamics of the Ti-Si-N system are reviewed leading to a revision of the ternary phase diagram at 1273 K to include the extended compositional ranges of delta-TiN(x) and Ti5Si3(N(y)) and the compounds Ti3Si, Ti5Si4, and alpha-Ti. This same information is presented in the form of phase stability diagrams which plot the stability criteria for each phase as a function of thermodynamic activity of one component and the relative composition of the other two components. Plots in terms of log a(Si) vs Ti/(Ti + N), log a(N2) vs Si/(Ti + Si), and log a(Ti) vs N/(Si + N) were constructed. All diagrams are consistent with current knowledge of phase compatibility and, therefore, are topologically correct. Further refinement will be possible as more accurate information on thermodynamics and compositional limits of solid solutions becomes available.
引用
收藏
页码:2362 / 2369
页数:8
相关论文
共 24 条
[1]   THIN-FILM REACTION BETWEEN TI AND SI3N4 [J].
BARBOUR, JC ;
KUIPER, AET ;
WILLEMSEN, MFC ;
READER, AH .
APPLIED PHYSICS LETTERS, 1987, 50 (15) :953-955
[2]   PHASE-EQUILIBRIA IN THIN-FILM METALLIZATIONS [J].
BEYERS, R ;
SINCLAIR, R ;
THOMAS, ME .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04) :781-784
[3]  
BORISOV YS, 1978, POROSHK METALL KIEV, V3, P63
[4]  
BRUKL CE, 1966, AFMLTR652 RES TECHN
[5]   REACTIONS WHICH FORM BOTH SILICIDE AND NITRIDE LAYERS [J].
DESU, SB ;
TAYLOR, JA .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (03) :509-515
[6]  
FERNANDEZ M, 1990, P MATER RES SOC S
[7]   TISI2 FORMATION AT THE TI-RICH TINX/SI INTERFACE [J].
FUJIMURA, N ;
ITO, T .
APPLIED SURFACE SCIENCE, 1989, 41-2 :272-276
[8]  
KUBASCHEWSKI O, 1987, ATOM ENERGY REV, P40
[9]   THE TITANIUM NITROGEN SYSTEM - A STUDY OF PHASE REACTIONS IN THE SUBNITRIDE REGION BY MEANS OF DIFFUSION COUPLES [J].
LENGAUER, W .
ACTA METALLURGICA ET MATERIALIA, 1991, 39 (12) :2985-2996
[10]  
MCCLAINE LA, 1965, EQUILIBRIUM STUDIES