THICKNESS MEASUREMENT OF ULTRATHIN FILMS ON METAL SUBSTRATES USING ATR

被引：13

作者：

KITAJIMA, H ^{[1
]}

HIEDA, K ^{[1
]}

SUEMATSU, Y ^{[1
]}

机构：

[1] KYUSHU INST TECHNOL,TOBATA KU,KITAKYUSHU 804,JAPAN

来源：

APPLIED OPTICS | 1980年 / 19卷 / 18期

关键词：

D O I：

10.1364/AO.19.003106

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：3106 / 3109

页数：4

共 16 条

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PETERSON, DW .

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[3] EFFECT OF THIN SURFACE FILM ON ELLIPSOMETRIC DETERMINATION OF OPTICAL CONSTANTS [J].

BURGE, DK ;

BENNETT, HE .

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[4]

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[5]

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[6]

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[7]

KITAJIMA H, UNPUBLISHED

[8] OPTICAL EXCITATION OF SURFACE PLASMA-WAVES IN LAYERED MEDIA [J].

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SCOTT, GD .

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[9]

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[10]

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