DEPOSITION TECHNIQUES FOR DIELECTRIC FILMS ON SEMICONDUCTOR-DEVICES

被引：31

作者：

AMICK, JA

SCHNABLE, GL

VOSSEN, JL

机构：

[1] EXXON RES & ENGN CO,LINDEN,NJ 07036

[2] RCA LABS,PRINCETON,NJ 08540

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 05期

关键词：

D O I：

10.1116/1.569412

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1053 / 1063

页数：11

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