REFLECTANCE VS ELECTROREFLECTANCE MEASUREMENTS ON ARSENIC-DOPED SILICON CRYSTAL

被引:3
作者
BORGHESI, A [1 ]
GEDDO, M [1 ]
GUIZZETTI, G [1 ]
MAGHINI, D [1 ]
STELLA, A [1 ]
CAMPISANO, U [1 ]
RIMINI, E [1 ]
机构
[1] UNIV CATANIA,DEPT FIS,I-95129 CATANIA,ITALY
来源
NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS | 1988年 / 10卷 / 08期
关键词
D O I
10.1007/BF02450198
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:979 / 988
页数:10
相关论文
共 14 条
[1]   ELECTRON-MICROSCOPY OF AS SUPERSATURATED SILICON [J].
ARMIGLIATO, A ;
NOBILI, D ;
SOLMI, S ;
BOURRET, A ;
WERNER, P .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (12) :2560-2565
[2]   DIRECT DETERMINATION OF SIZES OF EXCITATIONS FROM OPTICAL MEASUREMENTS ON ION-IMPLANTED GAAS [J].
ASPNES, DE ;
KELSO, SM ;
OLSON, CG ;
LYNCH, DW .
PHYSICAL REVIEW LETTERS, 1982, 48 (26) :1863-1866
[3]  
ASPNES DE, 1980, HDB SEMICONDUCTORS, pCHA4
[4]  
ASPNES DE, 1984, J APPL PHYS, V56, P2664
[5]  
BEANLAND DG, 1984, ION IMPLANTATION BEA, P262
[6]   OPTICAL STUDY OF SELF-ANNEALING IN HIGH-CURRENT ARSENIC-IMPLANTED SILICON [J].
BORGHESI, A ;
CHENJIA, C ;
GUIZZETTI, G ;
NOSENZO, L ;
STELLA, A ;
CAMPISANO, SU ;
RIMINI, E .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (07) :2773-2776
[7]  
CAMPISANO U, 1987, PHYS SCR B, V19, P544
[8]  
ENGSTROM H, 1980, J APPL PHYS, V51, P245
[9]  
GEDDO M, 1983, NUOVO CIMENTO D, V2, P1526
[10]  
PARAY PD, 1976, J VAC SCI TECHNOL, V13, P622