A SIMPLE MANS VIEW OF THE PASSIVATION OF SEMICONDUCTORS

被引：5

作者：

VANVECHTEN, JA

机构：

[1] Center for Advanced Materials Research Department of Electrical, Computer Engineering Oregon State University, Corvallis

来源：

CORROSION SCIENCE | 1990年 / 31卷

关键词：

Dangling Bond; Gettering; Hydrogen; Nitride; Noble Gas; Oxide; Passivation; Semiconductor; SiO[!sub]2[!/sub;

D O I：

10.1016/0010-938X(90)90089-N

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The author here attempts to present a fundamental and general discussion of the problem of passivating an electronic device made of semiconducting materials. He also points out what he believes to be a few misconceptions in the current literature and makes a suggestion for further progress. © 1990.

引用

页码：39 / 52

页数：14

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