OPTICAL DETECTION OF SURFACE DAMAGE IN GAAS INDUCED BY ARGON ION IMPLANTATION

被引：30

作者：

SELL, DD

MACRAE, AU

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1970年 / 41卷 / 12期

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D O I：

10.1063/1.1658564

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：4929 / &

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