ELECTROCHEMICAL SULFUR PASSIVATION OF GAAS

被引:64
作者
HOU, XY
CAI, WZ
HE, ZQ
HAO, PH
LI, ZS
DING, XM
WANG, X
机构
[1] Surface Physics Laboratory, Fudan University, Shanghai
关键词
D O I
10.1063/1.107475
中图分类号
O59 [应用物理学];
学科分类号
摘要
An anodic sulfurized treatment of GaAs has been developed to passivate its surfaces preventing oxidation. The photoemission core level spectra show that the surface Ga and As atoms are bonded to S atoms to form a thick sulfurized layer. No oxygen uptakes on the sulfurized GaAs surface as illustrated by the high resolution electron energy loss spectroscopy. The results of photoluminescence spectra verify that the passivated surface has low surface recombination velocity and can protect the photoassisted oxidation under laser illumination.
引用
收藏
页码:2252 / 2254
页数:3
相关论文
共 19 条
  • [1] EFFECTS OF NA2S AND (NH4)2S EDGE PASSIVATION TREATMENTS ON THE DARK CURRENT-VOLTAGE CHARACTERISTICS OF GAASPN DIODES
    CARPENTER, MS
    MELLOCH, MR
    LUNDSTROM, MS
    TOBIN, SP
    [J]. APPLIED PHYSICS LETTERS, 1988, 52 (25) : 2157 - 2159
  • [2] SCHOTTKY-BARRIER FORMATION ON (NH4)2S-TREATED N-TYPE AND P-TYPE (100)GAAS
    CARPENTER, MS
    MELLOCH, MR
    DUNGAN, TE
    [J]. APPLIED PHYSICS LETTERS, 1988, 53 (01) : 66 - 68
  • [3] INVESTIGATIONS OF AMMONIUM SULFIDE SURFACE TREATMENTS ON GAAS
    CARPENTER, MS
    MELLOCH, MR
    COWANS, BA
    DARDAS, Z
    DELGASS, WN
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (04): : 845 - 850
  • [4] CHANG CK, 1977, J HETEROCYCLIC CHEM, V14, P943, DOI 10.1116/1.569397
  • [5] X-RAY PHOTOELECTRON-SPECTROSCOPY OF AMMONIUM SULFIDE TREATED GAAS(100) SURFACES
    COWANS, BA
    DARDAS, Z
    DELGASS, WN
    CARPENTER, MS
    MELLOCH, MR
    [J]. APPLIED PHYSICS LETTERS, 1989, 54 (04) : 365 - 367
  • [6] METAL-DEPENDENT SCHOTTKY-BARRIER HEIGHT WITH THE (NH4)2SX-TREATED GAAS
    FAN, JF
    OIGAWA, H
    NANNICHI, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (11): : L2125 - L2127
  • [7] FORMATION OF S-GAAS SURFACE BONDS
    GEIB, KM
    SHIN, J
    WILMSEN, CW
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (04): : 838 - 842
  • [8] Jin X., 1990, VACUUM, V41, P1061
  • [9] STUDY OF CORE ELECTRON BINDING-ENERGIES IN SOME GROUP IIIA, VB, AND VIB COMPOUNDS
    MCGUIRE, GE
    SCHWEITZ.GK
    CARLSON, TA
    [J]. INORGANIC CHEMISTRY, 1973, 12 (10) : 2450 - 2453
  • [10] OIGAWA H, 1988, 20TH C SOL STAT DEV, P263