LPCVD OF TIN OXIDE FROM TETRAMETHYLTIN AND OXYGEN

被引：36

作者：

WAN, CF

MCGRATH, RD

KEENAN, WF

FRANK, SN

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 05期

关键词：

D O I：

10.1149/1.2096941

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1459 / 1463

页数：5

共 19 条

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