ON THE STRUCTURE OF THIN HYDROCARBON FILMS

被引：175

作者：

JACOB, W

MOLLER, W

机构：

[1] Max-Planck-Institut für Plasmaphysik, EURATOM Association, D-85748 Garching bei München

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 13期

关键词：

D O I：

10.1063/1.110683

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We compare reported compositions of a-C:H films in a ternary phase diagram. It is assumed that the films comprised three phases: sp3 hybridized carbon, sp2 hybridized carbon and hydrogen. The data are found to split into two well-separated groups. This separation depends on the method used to measure the sp3/sp2 ratio. We conclude from the comparison of NMR and infrared data that infrared analysis does not provide a quantitative measure of the sp3/sp2 ratio.

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页码：1771 / 1773

页数：3

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