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INFLUENCE OF H-C BONDS ON THE STOPPING POWER OF HARD AND SOFT CARBONIZED LAYERS
被引:38
作者
:
BOUTARD, D
论文数:
0
引用数:
0
h-index:
0
机构:
MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
BOUTARD, D
[
1
]
MOLLER, W
论文数:
0
引用数:
0
h-index:
0
机构:
MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
MOLLER, W
[
1
]
SCHERZER, BMU
论文数:
0
引用数:
0
h-index:
0
机构:
MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
SCHERZER, BMU
[
1
]
机构
:
[1]
MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
来源
:
PHYSICAL REVIEW B
|
1988年
/ 38卷
/ 05期
关键词
:
D O I
:
10.1103/PhysRevB.38.2988
中图分类号
:
T [工业技术];
学科分类号
:
08 ;
摘要
:
引用
收藏
页码:2988 / 2994
页数:7
相关论文
共 28 条
[1]
ADEL ME, 1987, AMORPHOUS HYDROGENAT, V17
[2]
ANDERSON HH, 1977, STOPPING POWERS RANG, V3
[3]
ANDERSON HH, 1977, STOPPING POWERS RANG, V4
[4]
ANGUS JC, 1985, PLASMA DEPOSITED THI, pCH4
[5]
BERGSAKER H, 1987, E MRS S P, V17
[6]
DEPTH DISTRIBUTION OF IMPLANTED HELIUM AND OTHER LOW-Z ELEMENTS IN METAL-FILMS USING PROTON BACKSCATTERING
BLEWER, RS
论文数:
0
引用数:
0
h-index:
0
机构:
SANDIA LABS,ALBUQUERQUE,NM 87115
SANDIA LABS,ALBUQUERQUE,NM 87115
BLEWER, RS
[J].
APPLIED PHYSICS LETTERS,
1973,
23
(11)
: 593
-
595
[7]
RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BRANDT, G
论文数:
0
引用数:
0
h-index:
0
BRANDT, G
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
JOURNAL OF APPLIED PHYSICS,
1983,
54
(08)
: 4590
-
4595
[8]
ELECTRICAL CHARACTERISTICS AND GROWTH-KINETICS IN DISCHARGES USED FOR PLASMA DEPOSITION OF AMORPHOUS-CARBON
CATHERINE, Y
论文数:
0
引用数:
0
h-index:
0
CATHERINE, Y
COUDERC, P
论文数:
0
引用数:
0
h-index:
0
COUDERC, P
[J].
THIN SOLID FILMS,
1986,
144
(02)
: 265
-
280
[9]
STRUCTURE AND PHYSICAL-PROPERTIES OF PLASMA-GROWN AMORPHOUS HYDROGENATED CARBON-FILMS
COUDERC, P
论文数:
0
引用数:
0
h-index:
0
机构:
CNRS, Nantes, Fr, CNRS, Nantes, Fr
COUDERC, P
CATHERINE, Y
论文数:
0
引用数:
0
h-index:
0
机构:
CNRS, Nantes, Fr, CNRS, Nantes, Fr
CATHERINE, Y
[J].
THIN SOLID FILMS,
1987,
146
(01)
: 93
-
107
[10]
BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
SOLID STATE COMMUNICATIONS,
1983,
48
(02)
: 105
-
108
←
1
2
3
→
共 28 条
[1]
ADEL ME, 1987, AMORPHOUS HYDROGENAT, V17
[2]
ANDERSON HH, 1977, STOPPING POWERS RANG, V3
[3]
ANDERSON HH, 1977, STOPPING POWERS RANG, V4
[4]
ANGUS JC, 1985, PLASMA DEPOSITED THI, pCH4
[5]
BERGSAKER H, 1987, E MRS S P, V17
[6]
DEPTH DISTRIBUTION OF IMPLANTED HELIUM AND OTHER LOW-Z ELEMENTS IN METAL-FILMS USING PROTON BACKSCATTERING
BLEWER, RS
论文数:
0
引用数:
0
h-index:
0
机构:
SANDIA LABS,ALBUQUERQUE,NM 87115
SANDIA LABS,ALBUQUERQUE,NM 87115
BLEWER, RS
[J].
APPLIED PHYSICS LETTERS,
1973,
23
(11)
: 593
-
595
[7]
RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BRANDT, G
论文数:
0
引用数:
0
h-index:
0
BRANDT, G
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
JOURNAL OF APPLIED PHYSICS,
1983,
54
(08)
: 4590
-
4595
[8]
ELECTRICAL CHARACTERISTICS AND GROWTH-KINETICS IN DISCHARGES USED FOR PLASMA DEPOSITION OF AMORPHOUS-CARBON
CATHERINE, Y
论文数:
0
引用数:
0
h-index:
0
CATHERINE, Y
COUDERC, P
论文数:
0
引用数:
0
h-index:
0
COUDERC, P
[J].
THIN SOLID FILMS,
1986,
144
(02)
: 265
-
280
[9]
STRUCTURE AND PHYSICAL-PROPERTIES OF PLASMA-GROWN AMORPHOUS HYDROGENATED CARBON-FILMS
COUDERC, P
论文数:
0
引用数:
0
h-index:
0
机构:
CNRS, Nantes, Fr, CNRS, Nantes, Fr
COUDERC, P
CATHERINE, Y
论文数:
0
引用数:
0
h-index:
0
机构:
CNRS, Nantes, Fr, CNRS, Nantes, Fr
CATHERINE, Y
[J].
THIN SOLID FILMS,
1987,
146
(01)
: 93
-
107
[10]
BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
SOLID STATE COMMUNICATIONS,
1983,
48
(02)
: 105
-
108
←
1
2
3
→