X-RAY PHOTOELECTRON-SPECTROSCOPY CHARACTERIZATION OF TIO2 FILMS DEPOSITED BY DYNAMIC ION-BEAM MIXING

被引：8

作者：

HUANG, NK

WANG, DZ

LU, Z

LIN, LB

机构：

[1] Institute of Nuclear Science and Technology, Sichuan University, Chengdu

来源：

SURFACE & COATINGS TECHNOLOGY | 1994年 / 70卷 / 01期

关键词：

D O I：

10.1016/0257-8972(94)90076-0

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

TiO2 films were prepared at room temperature by dynamic ion beam mixing where titanium was Ar+ sputter deposited on iron substrates and simultaneously bombarded with argon or oxygen ion beams at an energy of 100 keV. The chemical bonding states of the elements on the surface of the films were investigated by X-ray photoelectron spectroscopy (XPS). The XPS results show that carbon on the surface of the films exhibits different states for different bombarding ion species. Argon ion beam bombardment during film deposition induced carbonization forming an O-Ti-C bonding configuration, while oxygen ion bombardment did not. A mechanism related to this phenomenon is suggested.

引用

页码：69 / 71

页数：3

共 7 条

[1] TIN, TIC AND TI(C,N) FILM CHARACTERIZATION AND ITS RELATIONSHIP TO TRIBOLOGICAL BEHAVIOR [J].

BERTONCELLO, R ;

CASAGRANDE, A ;

CASARIN, M ;

GLISENTI, A ;

LANZONI, E ;

MIRENGHI, L ;

TONDELLO, E .

SURFACE AND INTERFACE ANALYSIS, 1992, 18 (07) :525-531

[2] OBSERVATION OF 2-DIMENSIONAL PHASES ASSOCIATED WITH DEFECT STATES ON SURFACE OF TIO-2 [J].

HENRICH, VE ;

DRESSELHAUS, G ;

ZEIGER, HJ .

PHYSICAL REVIEW LETTERS, 1976, 36 (22) :1335-1339

[3] X-RAY PHOTOELECTRON-SPECTROSCOPY STUDIES OF THE SURFACE OF ION-BEAM REACTIVE SPUTTER DEPOSITED ZIRCONIA FILMS [J].

HUANG, NK .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1992, 11 (10) :681-683

[4] SURFACE CHARACTERIZATION OF TI-IMPLANTED IRON BY XPS AND AES [J].

IWAKI, M ;

YABE, K ;

SUZUKI, M ;

NISHIMURA, O .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :150-153

[5] INTERACTION OF WATER, OXYGEN, AND HYDROGEN WITH TIO2(110) SURFACES HAVING DIFFERENT DEFECT DENSITIES [J].

PAN, JM ;

MASCHHOFF, BL ;

DIEBOLD, U ;

MADEY, TE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04) :2470-2476

[6] TITANIUM OVERLAYERS ON TIO2(110) [J].

ROCKER, G ;

GOPEL, W .

SURFACE SCIENCE, 1987, 181 (03) :530-558

[7] CARBURIZATION OF STEEL SURFACES DURING IMPLANTATION OF TI IONS AT HIGH FLUENCES [J].

SINGER, IL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :419-422

← 1 →