COMPOSITION AND PROPERTIES OF TRANSITION-METAL NITRIDE THIN-FILMS (ZRNX, NBNX, MONX)

被引：30

作者：

JEHN, HA ^{[1
]}

KIM, JH ^{[1
]}

HOFMANN, S ^{[1
]}

机构：

[1] MAX PLANCK INST MET RES,INST WERKSTOFFWISSENSCH,D-7000 STUTTGART 80,FED REP GER

来源：

SURFACE & COATINGS TECHNOLOGY | 1988年 / 36卷 / 3-4期

关键词：

D O I：

10.1016/0257-8972(88)90012-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：715 / 727

页数：13

共 32 条

[1] HARD CHROME COATINGS DEPOSITED BY PHYSICAL VAPOR-DEPOSITION [J].

AUBERT, A ;

GILLET, R ;

GAUCHER, A ;

TERRAT, JP .

THIN SOLID FILMS, 1983, 108 (02) :165-172

[2] PROPERTIES OF NBN THIN-FILMS DEPOSITED ON AMBIENT-TEMPERATURE SUBSTRATES [J].

BACON, DD ;

ENGLISH, AT ;

NAKAHARA, S ;

PETERS, FG ;

SCHREIBER, H ;

SINCLAIR, WR ;

VANDOVER, RB .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :6509-6516

[3] HARD MOLYBDENUM COATINGS PREPARED BY CATHODIC MAGNETRON SPUTTERING [J].

DANROC, J ;

AUBERT, A ;

GILLET, R .

THIN SOLID FILMS, 1987, 153 :281-286

[4] THE EFFECT OF THE DEPOSITION RATE ON THE PROPERTIES OF DC-MAGNETRON-SPUTTERED NIOBIUM NITRIDE THIN-FILMS [J].

DEEN, MJ .

THIN SOLID FILMS, 1987, 152 (03) :535-544

[5] CHARACTERIZATION OF HARD NITRIDE AND CARBIDE TITANIUM AND ZIRCONIUM COATINGS ON HIGH-SPEED STEEL CUTTING-TOOL INSERTS [J].

FENSKE, G ;

KAUFHERR, N ;

ALBERTSON, C ;

MAPALO, G ;

NIELSEN, R ;

KAMINSKY, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2879-2884

[6]

Fromm E., 1976, GASE KOHLENSTOFF MET

[7]

Gershenzon M. E., 1980, Soviet Physics - Technical Physics, V25, P343

[8]

HOFMANN S, 1986, J VAC SCI TECHNOL A, V4, P278

[9]

Holleck H, 1984, BINARE TERNARE CARBI

[10]

JEHN H, 1984, Z METALLKD, V75, P862

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