ARSENIC DIMERS AND MULTILAYERS ON (001)GAAS SURFACES IN ATMOSPHERIC-PRESSURE ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION

被引:61
作者
KAMIYA, I [1 ]
TANAKA, H [1 ]
ASPNES, DE [1 ]
FLOREZ, LT [1 ]
COLAS, E [1 ]
HARBISON, JP [1 ]
BHAT, R [1 ]
机构
[1] BELLCORE,RED BANK,NJ 07701
关键词
D O I
10.1063/1.107417
中图分类号
O59 [应用物理学];
学科分类号
摘要
Arsenic dimers and multilayers are shown to exist on (001)GaAs surfaces under atmospheric pressure (AP) organometallic chemical vapor deposition (OMCVD) conditions. We obtained reflectance-difference spectra from surfaces in AP H-2 that are equivalent to those obtained from the (2 X 4) and disordered-c(4 X 4) reconstructions prepared in ultrahigh vacuum by molecular beam epitaxy. Implications for models of OMCVD growth are discussed.
引用
收藏
页码:1238 / 1240
页数:3
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